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MECH 521 Fundamentals of Microelectromechanical Systems

Micro-fabrication of MEMS: solid-state technology and other micromachining techniques. Engineering principles of various MEMS devices.

This course is not eligible for Credit/D/Fail grading.

Credits: 4

Status Section Activity Term Mode of Delivery Interval Days Start Time End Time Section Comments Course Requires
In-Person Attendance
MECH 521 201Lecture2In-Person Mon Wed Fri10:0011:00Yes
MECH 521 L2ALecture2In-Person Mon17:0020:00Yes
MECH 521 L2BLecture2In-Person Wed17:0020:00Yes
UnreleasedMECH 521 L2CLecture2In-Person Fri17:0020:00Yes