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MECH 521 Fundamentals of Microelectromechanical Systems
Micro-fabrication of MEMS: solid-state technology and other micromachining techniques. Engineering principles of various MEMS devices.
This course is not eligible for Credit/D/Fail grading.
Credits: 4
- This course is restricted to students in one of these faculties: GRAD
- Choose one section from all 2 activity types. (e.g. Lecture and Laboratory)
| Status | Section | Activity | Term | Interval | Days | Start Time | End Time | Comments |
|---|---|---|---|---|---|---|---|---|
| MECH 521 201 | Lecture | 2 | Mon Wed Fri | 10:00 | 11:00 | |||
| MECH 521 L2A | Lecture | 2 | Mon | 17:00 | 20:00 | |||
| MECH 521 L2B | Lecture | 2 | Wed | 17:00 | 20:00 | |||
| Unreleased | MECH 521 L2C | Lecture | 2 | Fri | 17:00 | 20:00 |