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MECH 521 Fundamentals of Microelectromechanical Systems

Micro-fabrication of MEMS: solid-state technology and other micromachining techniques. Engineering principles of various MEMS devices.

This course is not eligible for Credit/D/Fail grading.

Credits: 4


Status Section Activity Term Interval Days Start Time End Time Comments
MECH 521 201Lecture2 Mon Wed Fri10:0011:00
MECH 521 L2ALecture2 Mon17:0020:00
MECH 521 L2BLecture2 Wed17:0020:00
UnreleasedMECH 521 L2CLecture2 Fri17:0020:00