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MTRL 579 Physics of Microfabrication: Front End Processing

Practical aspects, physical models, and simulations of Si-based nanofabrication processes such as oxidation, diffusion, ion implantation, chemical vapor deposition, etching, stress techniques. Semiconductor device physic basics will also be discussed.

This course is not eligible for Credit/D/Fail grading.

Credits: 3


Status Section Activity Term Interval Days Start Time End Time Comments
RestrictedMTRL 579 101Lecture1 Fri13:0015:00