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MTRL 579 Physics of Microfabrication: Front End Processing
Practical aspects, physical models, and simulations of Si-based nanofabrication processes such as oxidation, diffusion, ion implantation, chemical vapor deposition, etching, stress techniques. Semiconductor device physic basics will also be discussed.
- This course is restricted to students in one of these faculties: GRAD
|Status||Section||Activity||Term||Interval||Days||Start Time||End Time||Comments|
|Restricted||MTRL 579 101||Lecture||1||Fri||13:00||15:00|