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EECE 573 Micro and Nano Fabrication Technologies

Review of principles and practices of rnicro/nano fabrication technologies. Material and process selection; IC fabrication; silicon micromachining; LIGA; micro-EDM; mechanical processing; nanostructuring. Applications to MEMS/NEMS and other emerging devices.

This course is not eligible for Credit/D/Fail grading.

Credits: 3


Status Section Activity Term Interval Days Start Time End Time Comments
  EECE 573 101 Lecture 1 Mon Wed 15:00 16:30